Description of the infrastructure:

SEM-FEG microscope with focused ion beam gun. 7nm spatial resolution in SEM mode.

Services currently offered and possible applications in other fields:

• Preparation of electron-transparent samples for electron microscopy of materials and devices.
• Nano-machining using FIB of materials and devices.
• Preparation of samples in the form of nano-needles for analysis by electronic tomography and atom probe tomography, as well as for other applications that require this sample geometry.
• Handling of samples of different materials at the micro and nano scale, including cuts in the material by ionic attack, carbon or platinum deposition, transfer of material portions to grids, etc.
• Analysis of materials by SEM in secondary electron mode, with the ion beam and cathodoluminescencoa (77K).
• 3D ion beam analysis of the distribution of precipitates or other inclusions in materials and devices by tomographic reconstruction.
• Other specific operations that require the use of focused ion beams, specifically defined by the petitioner of the service.

Is it necessary to use a technician:  yes. Have a technician: yes.

Observations

The equipment is used by an IMEYMAT technician, a technician hired by the project, doctoral students and authorized PDIs.