The FIB dual beam, TESCAN brand and SOLARIS model, is a device that offers new options to the IMEYMAT in electron microscopy, more specifically in the availability of optical studies with the CL detector, being able to study large samples, being able to apply stereophotogrammetry to measure roughness, or heat-cool the sample, and in the possibility of developing instrumentation. This equipment allows to carry out:

1.- Observations in SEM mode with a resolution of up to 0.7nm.

2.- Observations in ion gun mode with a resolution of up to 15nm.

3.- Make cuts, nanomechanized thanks to the Ga ion cannon.

4.- Make TEM preparations (lamellae) of all kinds of materials and observations in transmission (similar to ADF or HAADF mode).

5.- Perform Electrolithography steps.

Any researcher can use this new equipment autonomously after receiving training or, if preferred, through the team technician Gonzalo Alba (gonzalo.alba@uca.es), who is also in charge of managing the reservations for the FIB sessions.

Below are the specifications:

BASE SYSTEM

• Scanning electron microscope (SEM), with a vacuum chamber that allows the introduction of large sample sizes (sample dimensions greater than width: 300 mm, depth: 300 mm, height: 100 mm).
• Tungsten source 1- 30kV, current between 1 pA-2 uA.
• SingleVac mode of operation for observation of insulating samples and WideField for large samples.

DETECTORS

• Secondary Detectors, SE.
• 4-quadrant BSE detector for topo, composition, or 3D roughness (with companion software).
• X-ray detector for EDXS, 30 mm.
• Panchromatic or RGB cathodoluminescence detector in the optical range of 350 nm – 850 nm.

SAMPLE HOLDER

• 5 degrees of freedom, all motorized including displacement in X, Y and Z, compucentric rotation of 360 degrees and tilt of the samples in an angle range of at least -60 to +90 degrees.
• Sample holders with heating-cooling in the range of -25 ˚C to +160 ˚C.

PORTS

• SUB DB-15 feedthrough port to be able to make electrical connections from the outside for on-site electrical tests.
• Fiber optic insertion port.
• Optical window.

OTHERS

• Possibility of automating experiments through scripting.
• Remote access both to speed up the review by the technical service, as well as for access to the equipment from another location.
• External port to be able to control the sweep of the beam.

State Program for Knowledge Generation and Scientific and Technological Strengthening of the R&D&I system. State Subprogram for Research Infrastructures and Scientific-Technical Equipment within the framework of the State Plan for Scientific and Technical Research and Innovation 2017-2020. 80% co-financed by FEDER. Reference EQC2019-006348-P, file EXP038/2021/19